Publication

第87回応用物理学会秋季学術講演会, 8p-PA1-9 (2026)
Verification of Multilayer Film Thickness Measurement Using Dual-Comb Spectroscopy

Author

〇高梨優希1、斧田将吾1、武子尚生1、高橋直人2、中嶋善晶1(1.東邦大学、2.大塚電子株式会社)

Category

Domestic Conference presentation